VLSI fabrication principles

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Title	VLSI fabrication principles
Edition
Call Number	621.38171 GHV/1983
ISBN/ISSN	0-471-86833-7
Author(s)	Ghandhi, Sorab K. - Personal Name
Subject(s)	Silicon Integrated Circuits-Very Large Scale Integration
Classification	621.38171
Series Title
GMD	Text
Language	English
Publisher	John Wiley
Publishing Year	1983
Publishing Place	New York
Collation	xi, 665p
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