Microelectronic applications of chemical mechanical planarization

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Title	Microelectronic applications of chemical mechanical planarization
Edition
Call Number	621.3815 MIC
ISBN/ISSN	978-0-471-71919-9
Author(s)	Li, Yuzhuo - Personal Name
Subject(s)	Integrated circuits- design and construction Chemical mechanical planarization Microelectronics- materials
Classification	621.3815
Series Title
GMD	Text
Language	English
Publisher	John Wiley & sons
Publishing Year	2008
Publishing Place	New Jersey
Collation	xxv, 734p.
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