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Title Applications of plasma processes to VLSI technology
Edition
Call Number 621.38173 APP
ISBN/ISSN 0-471-86960-0
Author(s) Sugano, Takuo - Personal Name
Kim, Hyo-Gun - Personal Name
Subject(s) Semiconductors
Plasma Etching
Classification 621.38173
Series Title
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Language English
Publisher John Wiley
Publishing Year 1985
Publishing Place New York
Collation xiv, 394p.
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