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Title Epitaxial silicon technology
Edition
Call Number 621.38152 EPI
ISBN/ISSN
Author(s) Baliga, B. Jayant. - Personal Name
Subject(s) Semiconductors - Design And Construction
Silicon Crystals - Growth
Epitaxy
Classification 621.38152
Series Title
GMD Text
Language English
Publisher Academic Press
Publishing Year 1986
Publishing Place Orlando
Collation viii, 328p
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