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Title Atomic layer epitaxy
Edition
Call Number 621.38152 ATO
ISBN/ISSN 0-412-02011-4
Author(s) Suntola, T - Personal Name
Simpson, M - Personal Name
Subject(s) Epitaxy
Thin films, Multilayered-Technique
Layer structure (solids)
Classification 621.38152
Series Title
GMD Text
Language English
Publisher Blackie
Publishing Year 1990
Publishing Place Glasgow
Collation ix, 182p.
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