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Title Handbook of advanced plasma processing techniques
Edition
Call Number 621.044 HAN
ISBN/ISSN 3-540-66772-5
Author(s) Shul, R. J. - Personal Name
Pearton, S. J. - Personal Name
Subject(s) Plasma Engineering
Electronic Circuts - Design and Construction
Plasma Spraying
Classification 621.044
Series Title
GMD Text
Language English
Publisher Springer-verlag
Publishing Year 2000
Publishing Place Berlin
Collation xvi, 653p
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