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Title Microlithography
Edition
Call Number 621.381531 WOR/1989
ISBN/ISSN 981-02-0137-0
Author(s) Craievich, Aldo - Personal Name
De Souza, G. Gerson Bezerra - Personal Name
Baranauskas, Vitor - Personal Name
Subject(s) Microlithography
Classification 621.381531
Series Title
GMD Text
Language English
Publisher World Scientific
Publishing Year 1990
Publishing Place Singapore
Collation viii, 184p
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