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Title Handbook of thin-film deposition processes and techniques
Edition 2nd ed.
Call Number 621.38152 HAN/2002
ISBN/ISSN 0-8155-1442-5
Author(s) Seshan, Krishna - Personal Name
Subject(s) Thin Film Devices - Design and Construction - Hand
Classification 621.38152
Series Title
GMD Text
Language English
Publisher Noyes Publications
Publishing Year 2002
Publishing Place Norwich
Collation xxviii, 629p
Abstract/Notes Acc. no.118529 has been transfered to Phy. dept.
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