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Title Chemical vapor deposition
Edition
Call Number 671.735 CHE
ISBN/ISSN 0-12-349670-5
Author(s) Hitchman, Michael L. - Personal Name
Jensen, Klavs F. - Personal Name
Subject(s) Chemical Vapor Deposition
Classification 671.735
Series Title
GMD Text
Language English
Publisher Academic Press
Publishing Year 1993
Publishing Place London
Collation v, 677p
Abstract/Notes Acc. no.P1921-22 have been transfered to Chem. Dept.
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