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Title Mems and nems
Edition
Call Number 621.381 LYS
ISBN/ISSN 0-8493-1262-0
Author(s) Lyshevski, Sergey Edward - Personal Name
Subject(s) Microelectromechanical Systems
Classification 621.381
Series Title
GMD Text
Language English
Publisher Crc Press
Publishing Year 2002
Publishing Place Boca Raton
Collation 461p
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