Contamination-free manufacturing for semiconductors and other precision products

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Title	Contamination-free manufacturing for semiconductors and other precision products
Edition
Call Number	621.38152 CON/2001
ISBN/ISSN	0-8247-0380-4
Author(s)	Donovan, Robert P. - Personal Name
Subject(s)	Semiconductors
Classification	621.38152
Series Title
GMD	Text
Language	English
Publisher	Marcel Dekker
Publishing Year	2001
Publishing Place	New York
Collation	x, 448p
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