Handbook of plasma immersion ion implantation and deposition

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Title	Handbook of plasma immersion ion implantation and deposition
Edition
Call Number	671.7 HAN
ISBN/ISSN	0-471-24698-0
Author(s)	Anders, Andre - Personal Name
Subject(s)	Ion Implantation Ion Bombardment - Industrial Applications Plasma \'Ionized Gases\' - Industrial Applications Metals - Surfaces Metals - Finishing
Classification	671.7
Series Title
GMD	Text
Language	English
Publisher	John Wiley
Publishing Year	2000
Publishing Place	New York
Collation	xxiii, 736p
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