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Title | Fundamentals of semiconductor fabrication |
Edition | |
Call Number | 621.38152 MAY |
ISBN/ISSN | 0-471-23279-3 |
Author(s) | May, Gary S. - Personal Name Sze, Simon M. - Personal Name |
Subject(s) | Semiconductors |
Classification | 621.38152 |
Series Title | GMD | Text |
Language | English |
Publisher | John Wiley |
Publishing Year | 2004 |
Publishing Place | Boston |
Collation | xiii, 305p |
Abstract/Notes | |
Specific Detail Info | |
Image | |
File Attachment | LOADING LIST... |
Availability | LOADING LIST... |
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