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| Title | Semiconductor fabrication |
| Edition | |
| Call Number | 621.38152 INT/1988 |
| ISBN/ISSN | 0-8031-1273-4 |
| Author(s) | Gupta, Dinesh C. - Personal Name |
| Subject(s) | Semiconductors |
| Classification | 621.38152 |
| Series Title | GMD | Text |
| Language | English |
| Publisher | American Society for Testing and Materials |
| Publishing Year | 1988 |
| Publishing Place | Philadelphia |
| Collation | 476p |
| Abstract/Notes | |
| Specific Detail Info | |
| Image |  |
| File Attachment | LOADING LIST... |
| Availability | LOADING LIST... |
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