Soft-X-ray projection lithography

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Title	Soft-X-ray projection lithography
Edition
Call Number	535 OSA/1991
ISBN/ISSN	1-55752-187-5
Author(s)	Bokor, Jeffrey - Personal Name
Subject(s)	Optics X-ray Lithography
Classification	535
Series Title
GMD	Text
Language	English
Publisher	Optical Society of America
Publishing Year	1991
Publishing Place	Washington
Collation	v.12: xi, 152p
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