Soft x-ray projection lithography

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Title	Soft x-ray projection lithography
Edition
Call Number	535 OSA/1993
ISBN/ISSN	1-55752-304-5
Author(s)	Hawryluk, Andrew M. - Personal Name Stulen, Richard H. - Personal Name
Subject(s)	Optics X-ray Lithography
Classification	535
Series Title
GMD	Text
Language	English
Publisher	Optical Society of America
Publishing Year	1993
Publishing Place	Washington
Collation	vol.18
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