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Title Micro and nanopatterning polymers
Edition
Call Number 621.381 MIC
ISBN/ISSN 0-8412-3581-3
Author(s) Ito, Hiroshi - Personal Name
Subject(s) Polymeric Composites
Microelectronics - Materials
Photoresists - Materials
Classification 621.381
Series Title
GMD Text
Language English
Publisher American Chemical Society
Publishing Year 1998
Publishing Place Washington
Collation xii, 386p
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