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Title Nano and micro electromechanical systems
Edition 2nd ed.
Call Number 621.381 LYS/2005
ISBN/ISSN 0-8493-2838-1
Author(s) Lyshevski, Sergey Edward - Personal Name
Subject(s) Microelectromechanical Systems
Nanotechnology
Classification 621.381
Series Title
GMD Text
Language English
Publisher Crc Press
Publishing Year 2005
Publishing Place Boca Raton
Collation 722p
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