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Title The Physics of micro Nano-Fabrication
Edition
Call Number 621.381 BRO
ISBN/ISSN 81-8489-413-4
Author(s) Brodie, Ivor - Personal Name
Muray, Julius J. - Personal Name
Subject(s) Microelectronics
thin-film circuits
Classification 621.381
Series Title
GMD Text
Language English
Publisher Springer India
Publishing Year 2010
Publishing Place New Delhi
Collation xix, 650p
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