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Found 2 from your keywords:
Subject : "Plasma Etching"
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Applications of plasma processes to VLSI technology
Author(s) : Sugano, Takuo - Kim, Hyo-Gun -
Edition :
Call Number : 621.38173 APP
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Plasma etching
Author(s) : Manos, Dennis, M - Flamm, Daniel L -
Edition :
Call Number : 621.044 PLA
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